SEMI發(fā)布五項新技術(shù)標準――包含光伏硅材料檢測方法

        此次新標準包含了對于光伏硅原料的檢測方法。SEMI國際標準總監(jiān)James Amano,表示，“隨著光伏產(chǎn)業(yè)的迅速發(fā)展，SEMI已就光伏產(chǎn)業(yè)創(chuàng)建了一套標準體系。相信新標準的建立對于設(shè)備及工藝領(lǐng)域?qū)⒂兴Ｕ稀?rdquo;

        五項標準分別是：

        SEMI E151
        Guide for Understanding Data Quality
        
        SEMI F107
        Guide for Process Equipment Adaptor Plates
        
        SEMI M75
        Specifications for Polished Monocrystalline Gallium Antimonide Wafers
        
        SEMI MS8
        Guide to Evaluating Hermeticity of MEMS Packages

        SEMI PV1
        Test Method for Measuring Trace Elements in Photovoltaic-Grade Silicon by High-Mass Resolution Glow Discharge Mass Spectrometry